Nta ntawm Diffused Silicon Pressure Sensors

Nta ntawm Diffused Silicon Pressure SensorUAX 19

1. Nws yog tsim rau kev tsim cov khoom siv me me: cov nyhuv piezoresistive ntawm lub zog-rhiab heev ntawm cov silicon nti tsis muaj qhov chaw tuag nyob rau hauv qhov qis qis ze zero point, thiab qhov ntau ntawm lub siab sensor yuav ua tau raws li me me li ob peb Kpa.

2. High tso zis rhiab heev: qhov rhiab heev ntawm silicon strain kuj yog 50 mus rau 100 lub sij hawm siab tshaj ntawm cov hlau strain gauges, yog li qhov rhiab heev ntawm cov khoom siv sensor yog siab heev, thiab qhov dav dav ntawm cov zis yog li 100mv. Yog li ntawd, tsis muaj qhov tshwj xeeb yuav tsum tau ua rau lub interface Circuit Court, thiab nws yooj yim dua rau siv.

3. High precision: Vim hais tias lub sensor qhov kev xav, rhiab heev hloov dua siab tshiab thiab nrhiav kom tau los ntawm tib lub ntsiab lus, tsis muaj intermediate conversion txuas, thiab qhov repeatability thiab hysteresis yuam kev yog me me. Txij li thaum lub monocrystalline silicon nws tus kheej yog nruj heev thiab lub deformation me me, zoo linearity yog guaranteed.

4. Txij li thaum lub unisexual deformation ntawm kev ua hauj lwm yog tsawg raws li qhov kev txiav txim ntawm micro-strain, qhov siab tshaj plaws hloov ntawm cov elastic nti yog nyob rau hauv qhov kev txiav txim ntawm sub-micron, yog li tsis muaj hnav, tsis muaj nkees, tsis muaj kev laus, thiab lub Kev pabcuam lub neej yog ntev li 1 × 103 lub voj voog siab, nrog kev ua haujlwm ruaj khov thiab muaj kev ntseeg siab.

5. Vim yog cov tshuaj tiv thaiv zoo heev ntawm silicon, txawm tias tsis muaj kev sib cais diffused silicon siab sensors muaj peev xwm hloov mus rau ntau yam xov xwm kom muaj txiaj ntsig zoo.

6. Txij li thaum lub nti txais kev sib xyaw ua ke thiab tsis muaj qhov sib kis, nws yog qhov me me thiab lub teeb hauv qhov hnyav.

Yog xav paub ntxiv, thov hu rauStella Meng.