Cov yam ntxwv ntawm Diffused Silicon Pressure Sensors

Piv nrog rau cov sensors ntawm lwm cov hauv paus ntsiab lus, diffused silicon siab sensors muaj cov yam ntxwv hauv qab no:

1. Haum rau kev ua me me sensors. Cov nyhuv piezoresistive ntawm lub zog rhiab resistor ntawm silicon nti tsis muaj qhov chaw tuag nyob rau hauv qhov qis qis ze rau xoom, thiab qhov ntau ntawm lub siab sensor tuaj yeem me me li ob peb Kpa.

2. High tso zis rhiab heev. Qhov rhiab heev ntawm silicon strain kuj yog 50-100 lub sij hawm siab tshaj ntawm cov hlau strain gauge, yog li lub rhiab heev ntawm cov coj sensor yog siab heev, thiab cov dav dav tso zis yog li ntawm 100mv. Yog li ntawd, tsis muaj qhov tshwj xeeb xav tau rau lub interface Circuit Court, thiab nws yooj yim dua rau siv.

3. High precision. Txij li thaum qhov kev hnov ​​​​lus, kev hloov siab los ntseeg thiab kev tshawb pom ntawm lub sensor yog pom tau los ntawm tib qho kev tivthaiv, tsis muaj qhov sib txuas hloov pauv nruab nrab, thiab qhov rov ua dua thiab hysteresis yuam kev me me. Txij li thaum lub monocrystalline silicon nws tus kheej muaj zoo rigidity thiab me ntsis deformation, zoo linearity yog guaranteed.

4. Vim tias qhov qis deformation ntawm kev ua hauj lwm unitary mus rau qhov kev txiav txim ntawm micro-strain, qhov siab tshaj plaws hloov ntawm cov elastic nti yog nyob rau hauv qhov kev txiav txim ntawm sub-micron, yog li tsis muaj hnav, tsis muaj zog, tsis muaj kev laus, thiab cov kev pab cuam. Lub neej ntev npaum li 1 × 103 lub voj voog, nrog kev ua haujlwm ruaj khov thiab muaj kev ntseeg siab.

5. Vim yog cov tshuaj zoo heev los tiv thaiv corrosion ntawm silicon, txawm tias tsis yog cais tawm diffused silicon siab sensors muaj peev xwm hloov mus rau ntau yam xov xwm.

6. Txij li thaum lub nti tau txais kev siv thev naus laus zis thiab tsis muaj qhov sib kis, nws yog qhov me me thiab lub teeb hauv qhov hnyav.

Tej lus nug txog pebUPB 1silicon siab transmitter, thov hu rauStella Meng.